Prior Information Notice For Electromechanical Equipment – Elektronový Litograf 100 Kv/Electron Beam Lithograph 100 Kv. The Subject Of The Public Contract Is An Electron Lithographer With An Accelerating Voltage Of 100 Kv, Which Is Used For Prototyping Nanostructures For The Field Of Nanoscience And Nanotechnology. An Accelerating Voltage Of 100 Kv Enables Precise Writing Of The Manufactured Structures By Gaussian Beam With A Resolution In The Order Of Nanometer Units Using Commonly Available Commercial Resists For Electron Beam Lithography. The Required Device Must Contain A Fully Functional Technological Unit Including A Complete Vacuum System, A Cooling System, A Stable Electron Source, An Electron Tube, A Chamber, An Interferometric Table, A Multi-Cassette Loading Chamber Including Substrate Holders With Different Dimensions, An Electron Deflection System, A Pattern Generator, A Complete Electronic System, Control Data Station With The Possibility Of Remote Access, Sw Package To Control The Electron Lithograph, Alignment Microscope. The Specification Of Requirements And Accessories Will Be Defined In The Procurement Documentation For The Public Contract.
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